FHR ANLAGENBAU GMBH
- Booth No: 6-26
- Feature Magnetron sputtering tools for deposition of optical layer stacks at highest precision
The FHR.Star-EOSS product series are a specially developed vacuum coating systems for the deposition of multiple optical layers that meet highest demands on layer thickness uniformity, and reproducability. A sputter-up arrangement was chosen to improve the layer quality. The sputtering systems are suited to process flat and curved substrates up to 200 mm or 300 mm in diameter.
- Country of Manufacturer: Germany
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